Product novelty 16. April 2026

Sputtering System for the Deposition of Optical Interference Coatings on Large Substrates with Flat and Curved Surfaces.

System Description
The FHR.Star.600-EOSS® is a remarkable solution for manufacturing high-precision optical interference coatings
and meets the highest demands on layer thickness uniformity and reproducibility. Its sputter-up technology
ensures flawless layer quality while the turntable arrangement accelerates throughput tremendously.
Suitable for flat and curved substrates up to 320mm in diameter or 370 x 320 mm.

Key Benefits
• Enhanced layer quality with defect-free films through a bipolar sputter-up target arrangement
• Efficient active gas separation between process areas
• Rotary targets ensure the highest material yield and reduce wear-out drift
• In-situ magnetic field control
• Fully automated process control
• Recipe program generator for maximum processing flexibility

Thin-Film Deposition Application Fields
• Smart glass (e.g. AR)
• Filters and mirrors (bandpass, notch, edge filters, dichroics, polarizers,...)
• Display technology
• Lenses
• Laser mirrors
• VR device components