BeamTec GmbH

Exhibition hall 3.1 – Booth 614


Contact

BeamTec GmbH
Wolfgang-Paul-Str.4
Science Park III
89081 Ulm
Germany

+49 731 146620 0

+49 731 146620 99



Product overview

Optical measuring and test technology
  • Layer thickness measuring technology

Optical components and materials
  • Optical coatings

Thin-film technology
  • Applications and processes for the production of optical thin films
  • Vacuum/high-vacuum technology

Product Innovations

COLT10 Quartz Crystal Sensor Head

The COLT10 quartz crystal sensor is a unique thin film sensor featuring an actively cooled revolving quartz carousel for 10 industry standard 14 mm / 0.550" diameter quartzes in a compact 88 mm OD enclosure. Whereas other revolving type sensors only provide cooling of the static sensor housing the COLT10 maintains the rotary crystal head itself and motor at optimum operating temperature range for reproducible thin film measurement.

The built-in stepper motor allows for fast and direct positioning with reference position feedback. The COLT10 is fully compatible with all commercially available film thickness monitor and control systems.

The sensor head can be installed in a vacuum chamber in any orientation by using a NW16 utility port for water and electrical supply. Alternatively a 60 mm tube extension offers installment in a standard QSK6 type central mounting flange with variable penetration depth.

An optionally available swing shutter provides shuttering for the active crystal aperture for extended process runs and sample&hold measurement technique. It‘s pneumatic actuator gas line is also fed via the single NW16 port.

COLT10 Quartz Crystal Sensor Head
COLT10 Quartz Crystal Sensor Head

Product group:

Thin-film technology


Contact

Mr. Ralph Kempter

+49 731 1466200