Halle 3.1 – Stand 508


In the light of the changing industry landscape generated by emerging technology device applications, SOLAYER offers the precision optical coating production tool AVIOR M-300. Further innovations in the recent version not only guarantees high throughput & reliable mass production of precision optics, but also keeps within the outperforming film characteristics such as uniformity, thermal stability and non-absorption to moisture.

The AVIOR M-300 is designed to produce sophisticated dielectric filters such as edge filters, bandpass and notch filters, as well as beam splitters & mirrors. Its market attraction stems from the ability to meet proprietary coating specifications for optical filters in consumer electronics, automotive sensors and telecommunication accessories. Recent developments on amorphous silicon (a-Si:H) layers have enabled a major advancement in the production of narrow bandpass filters for 3D-sensing applications.

The AVIOR M-300 can accommodate as much as 12 units of 300 mm substrates per run. Its’ flexibility in production owing to the carrier system gives it a fifty percent increase in throughput, relative to rival tools on the 200 mm substrate size.

Process stability is guaranteed due to the load-lock design which ensures uninterrupted vacuum, while the modular design feature which admits as much as four materials and two plasma sources results in a variety of dielectric, metallic & hybrid thin film layers.

Equipped with either an in-situ monochromatic or broadband optical monitoring system for deposition & film process monitoring-control, frequent calibration and test-runs, even for stack designs of several hundred layers can be avoided; leading to stable & predictable deposition processes for several weeks. Extremely dense & shift free layers can be deposited with layers that have almost no intrinsic roughness & a unique uniformity of down to ± 0.2 percent.

SOLAYER’s AVIOR M-300 brings simplicity to precision optics production.





  • Sachsenallee 28
  • 01723 Kesselsdorf
  • Deutschland