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Halle 3.1 – Stand 508

PRECISION OPTICAL COATING EQUIPMENT FOR EMERGING TECHNOLOGIES

In the light of the changing industry landscape generated by emerging technology device applications, SOLAYER offers the precision optical coating production tool AVIOR M-300. Further innovations in the recent version not only guarantees high throughput & reliable mass production of precision optics, but also keeps within the outperforming film characteristics such as uniformity, thermal stability and non-absorption to moisture.

The AVIOR M-300 is designed to produce sophisticated dielectric filters such as edge filters, bandpass and notch filters, as well as beam splitters & mirrors. Its market attraction stems from the ability to meet proprietary coating specifications for optical filters in consumer electronics, automotive sensors and telecommunication accessories. Recent developments on amorphous silicon (a-Si:H) layers have enabled a major advancement in the production of narrow bandpass filters for 3D-sensing applications.

The AVIOR M-300 can accommodate as much as 12 units of 300 mm substrates per run. Its’ flexibility in production owing to the carrier system gives it a fifty percent increase in throughput, relative to rival tools on the 200 mm substrate size.

Process stability is guaranteed due to the load-lock design which ensures uninterrupted vacuum, while the modular design feature which admits as much as four materials and two plasma sources results in a variety of dielectric, metallic & hybrid thin film layers.

Equipped with either an in-situ monochromatic or broadband optical monitoring system for deposition & film process monitoring-control, frequent calibration and test-runs, even for stack designs of several hundred layers can be avoided; leading to stable & predictable deposition processes for several weeks. Extremely dense & shift free layers can be deposited with layers that have almost no intrinsic roughness & a unique uniformity of down to ± 0.2 percent.

SOLAYER’s AVIOR M-300 brings simplicity to precision optics production.

Ansprechpartner

Produktgruppe

Dünnschichttechnologie

Kontakt

  • SOLAYER GmbH
  • Sachsenallee 28
  • 01723 Kesselsdorf
  • Deutschland